Single crystal silicon carbide and method for producing the same

ABSTRACT

The invention is a high-temperature liquid phase growth method using a very thin Si melt layer and characterized in that there is no need of strict temperature difference control between the growing crystal surface and a raw material supply polycrystal, and control of impurity addition is possible. The grown single crystal SiC is characterized in that no fine grain boundaries exist therein, the density of micropipe defects in the growth surface is 1/cm 2  or less, and the crystal has a terrace of 10 micrometer or more and a multi-molecular layer step as the minimum unit of a three-molecular layer.

TECHNICAL FIELD

The present invention relates to single crystal silicon carbide, morespecifically, to single crystal silicon carbide used in broad fields assemiconductor devices such as light-emitting diodes, power devices,high-frequency devices, and environment-resistant devices.

BACKGROUND ART

Silicon carbide (hereinafter referred to as SiC) is superior in heatresistance and mechanical strength, besides it has good resistance toradiation. Further, it is easy to perform valence control of electronsand holes by doping with impurities. Furthermore, SiC has a wide bandgap, for example, single crystal 6H—SiC has a band gap of about 3.0 eVand single crystal 4H—SiC has a band gap of 3.3 eV. Therefore, it ispossible to realize high temperature, high frequency, withstand voltage,and environmental resistance properties, which can not be realized byany existing semiconductor material such as silicon (hereinafterreferred to as Si) and gallium arsenide (hereinafter referred to asGaAs). SiC attracts attention and is expected as a semiconductormaterial for next-generation power devices and high-frequency devices.On the other hand, hexagonal SiC has a lattice constant close to that ofgallium nitride (hereinafter referred to as GaN) and is expected as asubstrate for GaN.

Conventionally, single crystal SiC of this type is produced by asublimation and recrystallization method (modified Lely method) in whicha seed crystal is fixedly placed on the lower-temperature side in agraphite crucible and SiC powder as a raw material is inserted in thehigher-temperature side, and then the interior of the graphite crucibleis heated to a high temperature of 1450 to 2400 degrees C. in an inertatmosphere, and thereby the SiC powder is sublimated and recrystallizedon a surface of the seed crystal on the lower-temperature side to grow asingle crystal. Otherwise, single crystal SiC is produced by an liquidphase epitaxial growth method (hereinafter referred to as LPE method) inwhich Si melt is put in a crucible containing carbon (hereinafterreferred to as C) atoms, and then the Si melt is heated to the crystalgrowth temperature by heating the crucible and a single crystal SiCsubstrate supported by a holder or the like is dipped in alow-temperature region in the Si melt for a certain time, and thereby Cas a constituent element of the crucible is dissolved in the Si melt andsingle crystal SiC produced by reaction between Si and C is epitaxiallygrown on a surface of the single crystal SiC substrate.

In the above-described conventional growth methods, however, in case ofthe sublimation and recrystallization method, although the growth rateis very high as several hundreds micrometer/hr, the SiC powder is oncedecomposed into Si, SiC₂, and Si₂C upon sublimation to evaporate, andfurther they react with part of the graphite crucible. Therefore, gasthat reaches the surface of the seed crystal varies in kind inaccordance with a change in temperature. It is technically verydifficult to stoichiometrically accurately control the partial pressuresof them. In addition, impurities are easy to mix in, and crystaldefects, micropipe defects, etc., are apt to be generated under theinfluence of distortion caused by the mixed impurities or heat. Further,there is generation of grain boundaries caused by generation of manynuclei. Thus, there is a problem that single crystal SiC stable inperformance and quality can not be obtained.

On the other hand, in case of the LPE method, there is less generationof micropipe defects, crystal defects, etc., as observed in thesublimation and recrystallization method, and single crystal SiC isobtained that is superior in quality in comparison with that produced bythe sublimation and recrystallization method. However, as shown withblack triangular marks in FIG. 6, the growth rate is very low as 10micrometer/hr or less because the rate of the growth process isinfluenced by the solubility of C in the Si melt. Therefore, theproductivity of single crystal SiC is low and the temperature of theliquid phase in the production apparatus must be accurately controlled.In addition, the production process is complicated and the productioncost of single crystal SiC is very high. A method of mixing transitionmetal such as Sc in the Si melt may be adopted so that the solubility ofC in the Si melt is increased to promote the growth rate. In this case,however, because the transition metal is taken in the growing crystal asimpurities, the purity is deteriorated. Thus, single crystal SiC fullysatisfactory in quality and performance can not be obtained. In thegrowth process, as shown with square marks in FIG. 6, the solubility ofC in the Si melt is increased by mixing Sc in. However, there is aproblem that the productivity of single crystal SiC is very low incomparison with the sublimation and recrystallization method.

The present invention has been made in view of the above-describedproblems and aims to provide high-quality, high-performance singlecrystal SiC in which generation of micropipe defects, interface defects,etc., is less and which has a broad terrace and high surface flatness.

DISCLOSURE OF THE INVENTION

Single crystal SiC according to the present invention is single crystalSiC formed by a liquid phase epitaxial method by forming a very thin Simelt layer in a local region, i.e., at the interface between amonocrystal substrate and a polycrystal substrate, and characterized inthat there are no fine grain boundaries and the density of micropipedefects in a surface is not more than 1/cm².

Because there are no fine grain boundaries in the growth crystal and thedensity of micropipe defects in a surface is not more than 1/cm², it ispossible to efficiently use formed single crystal SiC, and applicationas various semiconductor devices is possible. Micropipe defects are alsocalled pin holes, which are tubular spaces each having a diameter ofseveral micrometer or less and extending along the growth direction ofthe crystal.

In single crystal SiC according to the present invention, said surfacehas an atomic order step as the minimum unit of a three-molecular layer,and a broad terrace, and a width of said terrace is not less than 10micrometer.

Because the width of the terrace is not less than 10 micrometer, thereis no need of surface treatment by mechanical processing or the like.Therefore, it is possible to make a production not through anyprocessing step.

In single crystal SiC according to the present invention, said surfaceis a (0001) Si plane.

Because the orientation of the surface is a (0001) Si plane, the surfaceenergy is low in comparison with a (0001) C plane. Therefore, thenucleus formation energy in growth is high and nuclei are hard to form.For the above reason, single crystal SiC having a broad terrace can beobtained after liquid phase growth.

Single crystal SiC according to the present invention isliquid-phase-epitaxially grown on a single crystal SiC substrate in astate wherein said single crystal SiC substrate as a seed crystal and apolycrystal SiC substrate are piled up, they are put in a closedcontainer made of graphite, high-temperature heat treatment is thenperformed to interpose metallic Si melt between said single crystal SiCsubstrate and said polycrystal SiC substrate, and an evaporation part ofsaid melt itself and a difference quantity between an amount of Si fedfrom said polycrystal SiC substrate and Si consumption consumed inepitaxial growth of single crystal SiC are supplied from a Si sourceseparately placed.

Upon heat treatment, by the capillary phenomenon, wetness of Sipermeates anywhere in the interface between the single crystal SiCsubstrate and the polycrystal SiC substrate to form a very thin metallicSi melt layer. C atoms having flown out of the polycrystal SiC substrateare supplied to the single crystal SiC substrate through the Si meltlayer to liquid-phase-epitaxially grow as single crystal SiC on thesingle crystal SiC substrate. Therefore, induction of defects can besuppressed from the beginning to the end of the growth. In addition,because there is no need of treatment by dipping in melted Si as in aconventional method, the amount of removal of Si melted and havingadhered to the single crystal SiC substrate as a seed crystal and thepolycrystal SiC substrate is very little.

In addition, because the very thin metallic Si melt layer is interposedbetween the single crystal SiC substrate and the polycrystal SiCsubstrate upon heat treatment, only metallic Si necessary for epitaxialgrowth of single crystal SiC can be used for liquid phase epitaxialgrowth of single crystal SiC. Therefore, in the thin Si layer upon heattreatment, the contact area with the exterior is the minimum. Thus, thepossibility of entrance of impurities is reduced and highly pure singlecrystal SiC can be formed.

In addition, because the very thin metallic silicon melt layer isinterposed with supplying a Si source, the thickness of formed singlecrystal SiC can be controlled into a prescribed thickness.

In single crystal SiC according to the present invention, a thickness ofsaid very thin metallic silicon melt layer is not more than 50micrometer.

Because the very thin metallic Si melt layer interposed between thesingle crystal SiC substrate and the polycrystal SiC substrate upon heattreatment is 50 micrometer or less, preferably, 30 micrometer or less, Cdissolved from the polycrystal SiC substrate is transported by diffusiononto the surface of the single crystal SiC substrate to promote thegrowth of single crystal SiC. If the thickness of said very thinmetallic silicon melt layer is 50 micrometer or more, the metallicsilicon melt layer is unstable, and transportation of C is hindered.This is unsuitable for the growth of single crystal SiC according to thepresent invention.

In single crystal SiC according to the present invention, there isformed no temperature difference between said single crystal SiCsubstrate and said polycrystal SiC substrate upon said high-temperatureheat treatment.

Because there is formed no temperature difference between the singlecrystal SiC substrate and the polycrystal SiC substrate, heat treatmentcan be performed in a thermal equilibrium condition. In addition,because the metallic melt layer is thin, heat convection is suppressed.Further, because formation of nuclei is suppressed upon heat treatment,generation of fine grain boundaries in the formed single crystal SiC canbe suppressed. In addition, a simple heat treat apparatus can be used.Besides, because there is no need of strict temperature control uponheating, remarkable reduction of manufacture cost can be made.

Single crystal SiC according to the present invention is usable as asingle crystal SiC body and a surface epitaxial growth layer of singlecrystal SiC.

Because single crystal SiC having an arbitrary thickness can be formed,application to a single crystal SiC body and a surface epitaxial growthlayer is possible.

In single crystal SiC according to the present invention, a group IIImetal is added so that the conductivity is controlled into p-type.

By adding aluminum (hereinafter referred to as Al) or boron (hereinafterreferred to as B) as group III metal, or a gaseous compound containingit, for example, trimetylaluminum (hereinafter referred to as TMAl),triethylaluminum (hereinafter referred to as TEAl), B₂H₆, etc., theconductivity of the formed single crystal SiC can be controlled intop-type.

In single crystal SiC according to the present invention, a group Velement is added so that the conductivity is controlled into n-type.

By adding nitrogen (hereinafter referred to as N) as a group V element,the conductivity of single crystal SiC can be controlled into n-type. Asa method for adding, upon heat treatment, N₂ gas is introduced into theclosed container made of graphite. Otherwise, silicon nitride(hereinafter referred to as Si₃N₄) is placed together with Si within theclosed container made of graphite. An arbitrary method can be adopted.

In a method for producing single crystal silicon carbide, wherein asingle crystal silicon carbide substrate as a seed crystal and apolycrystal silicon carbide substrate are piled up, very thin metallicSi melt layer is interposed between said single crystal silicon carbidesubstrate and said polycrystal silicon carbide substrate, they areplaced in a closed container made of graphite, and high-temperature heattreatment is then performed with supplying, from a Si source separatelyplaced, an evaporation part of the melt itself and a difference part ofthe amount of Si fed from the polycrystal SiC substrate from Si consumedin epitaxial growth of single crystal SiC so that single crystal siliconcarbide is liquid-phase-epitaxially grown on said single crystal siliconcarbide substrate.

By this method, because there is no need of treatment by dipping inmelted Si, there is no permeation of excessive Si between the singlecrystal SiC substrate and the polycrystal SiC substrate.

In addition, by this method, entrance of impurities upon heat treatmentcan be suppressed and highly pure single crystal SiC can be formed. Inaddition, by separately supplying the Si source for liquid phaseepitaxial growth of single crystal SiC, evaporation of very thinmetallic Si can be suppressed to form single crystal SiC having anarbitrary thickness.

In the production of single crystal SiC according to the presentinvention, in the used single crystal SiC substrate as a seed crystal, a(0001) Si plane of 6H—SiC is preferably used. In addition, thepolycrystal SiC substrate preferably has a mean grain size of 5micrometer to 10 micrometer and it is preferably substantially even ingrain size. Thus, the crystal structure of the polycrystal SiC substrateis not particularly limited and any of 3C−SiC, 4H−SiC, and 6H−SiC can beused.

In the method for producing single crystal silicon carbide according tothe present invention, a group III metal is added in one or both of saidpolycrystal SiC substrate and very thin metallic Si melt layer so thatthe conductivity of single crystal SiC liquid-phase-epitaxially grown onsaid single crystal SiC substrate is controlled into p-type.

Upon heat treatment, a gaseous compound containing Al, B, or the like,as a group III metal, for example, TMAl, TEAl, B₂H₆, or the like, issupplied into the closed container made of graphite. Or, by beforehandadding Al, B, or the like, as a group III metal, in one or both of thepolycrystal SiC substrate or very thin metallic Si melt layer, theadditive is supplied into formed single crystal SiC upon liquid phaseepitaxial growth so that the conductivity of the single crystal SiC canbe controlled.

In the method for producing single crystal silicon carbide according tothe present invention, a group V element is added in one or both of saidpolycrystal SiC substrate and very thin metallic Si melt layer so thatthe conductivity of single crystal SiC liquid-phase-epitaxially grown onsaid single crystal SiC substrate is controlled into n-type.

By supplying Si₃N₄ or N₂ gas as a group V element or a gaseous compoundcontaining a group V element, upon heat treatment together with a Sisource, the conductivity of single crystal SiC can be controlled inton-type.

Thus, by adequately selecting a group III metal or a gaseous compoundcontaining a group III metal, or a group V element or a gaseous compoundcontaining a group V element, as an additive to be added uponhigh-temperature heat treatment, the conductivity of single crystal SiCcan be controlled into p- or n-type.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a sectional view illustrating an example of a heat treatfurnace used in a producing method of single crystal SiC according tothe present invention.

FIG. 2 is a sectional view illustrating a heat treat furnace forexplaining an example of another producing method of single crystal SiCaccording to the present invention.

FIGS. 3 are microphotographs of a surface of a growth layer of singlecrystal SiC according to this embodiment. (a) is a microphotographshowing the surface morphology and (b) is a microphotograph showing itssection.

FIGS. 4 are AFM images of a surface of single crystal SiC illustrated inFIG. 3.

In FIGS. 4, (a) is an AFM image of the surface morphology and (b) is anAFM image showing its section.

FIGS. 5 are views for explaining the step-bunching mechanism in thegrowth process of single crystal SiC according to this embodiment.

FIG. 6 is a graph showing a comparison in growth rate between singlecrystal SiC according to the present invention and single crystal SiCaccording to conventional LPE methods.

FIGS. 7 show cathode luminescence measurement results of a growth layerof single crystal SiC doped with impurities according to thisembodiment.

In FIGS. 7, (a) is a graph showing the measurement results and (b) is adiagram showing the energy levels.

BEST FORM FOR CARRYING OUT THE INVENTION

Hereinafter, single crystal SiC according to the present invention willbe described with reference to FIGS. 1 and 2 using examples different inmanner of interposing very thin metallic Si melt between monocrystal andpolycrystal SiC substrates.

Hereinafter, single crystal SiC according to the present invention willbe described with reference to FIGS. 1 and 2 using examples different inmanner of interposing very thin metallic Si melt layer between singlecrystal and polycrystal SiC substrates.

FIG. 1 is a schematic sectional view of a heat treat furnace used forgrowing single crystal SiC according to the present invention. In FIG.1, reference numeral 1 denotes a single crystal 6H—SiC substrate as aseed crystal. Reference numerals 2 and 3 denote polycrystal SiCsubstrates sandwiching the single crystal SiC substrate 1. Referencenumeral 4 denotes metallic Si. Reference numeral 7 denotes a Si piecefor controlling sublimation of SiC upon heat treatment. Referencenumeral 10 denotes a crucible made of graphite. Reference numeral 11denotes an upper cover. Reference numeral 12 denotes a soaking case.

As illustrated in FIG. 1, the single crystal SiC substrate 1,polycrystal SiC substrates 2 and 3, and metallic Si 4 are put on a SiCring 6 with an interposed graphite sheet 5. They are accommodated in ahermetic closed container constructed by an upper cover 9 and a crucible8 each made of graphite. The single crystal SiC substrate 1 was cut outinto a desired size of 10 multiplied by 10 to 20 multiplied by 20 mmfrom a wafer of single crystal 6H—SiC made by a sublimation method. Asthe polycrystal SiC substrates 2 and 3 usable are those cut out into aprescribed size from SiC used as a dummy wafer in a manufacturingprocess of a Si semiconductor made by a CVD method. The surface of eachof the substrates 1, 2, and 3 has been polished into a mirror surface,and oils, oxide films, metals, etc., having adhered to the surface havebeen removed by washing or the like. The lower polycrystal SiC substrate3 is for preventing the single crystal SiC substrate 1 from being erodedfrom the graphite crucible 8. It contributes an improvement in qualityof single crystal SiC that is LPE-grown on the single crystal SiCsubstrate 1.

Further, the graphite crucible 8 is placed within the graphite crucible10 together with Si pieces 7 for controlling sublimation of SiC andevaporation of Si upon heat treatment. The Si pieces 7 are sublimatedupon heat treatment to increase the partial pressure of SiC and thepartial pressure of Si in the graphite crucible 10. They contributeprevention of sublimation of the single crystal SiC substrate 1,polycrystal SiC substrates 2 and 3, and very thin metallic Si placedwithin the graphite crucible 8. The graphite crucible 10 is sealed withthe upper cover 11 made of graphite, and then placed within the soakingcase 12. It is accommodated within the heat treat furnace to suffer heattreatment. In the heat treat furnace of this embodiment, because thereis no need of formation of temperature difference between the singlecrystal SiC substrate 1 and the polycrystal SiC substrates 2 and 3, noaccurate temperature control in the furnace is required. Any of ahigh-frequency furnace, a resistance superheating furnace, etc., can beused. Thus, the form of the treat furnace is not particularly limited.

After the gas in the furnace is replaced by reducing gas, heat treatmentis performed in the reducing gas atmosphere. The temperature of heattreatment suffices if the metallic Si 4 can be melted at thetemperature. It is 1450 degrees C. or more, preferably, 2000 to 2300degrees C. As the treatment temperature increases, the wettabilitybetween melted Si and SiC is more improved and the melted Si becomeseasy to permeate between the single crystal SiC substrate 1 and thepolycrystal SiC substrate 2 by the capillary phenomenon. Thus, very thinmetallic Si melt layer having a thickness of 50 micrometer or less canbe interposed between the single crystal SiC substrate 1 and thepolycrystal SiC substrate 2. The treatment time can be adequatelyselected such that the produced single crystal SiC has a desiredthickness. If a large amount of metallic Si 4 is placed on thepolycrystal SiC substrate 2, the quantity of the metallic Si 4 meltedupon heat treatment increases. If the thickness of the metallic Si meltis 50 micrometer or more, the metallic Si melt becomes unstable, andtransportation of C. is hindered. It is unsuitable for growth of singlecrystal SiC according to the present invention. In addition, Siunnecessary for formation of single crystal SiC is melted and collectedin the bottom portion of the graphite crucible 8, and there arisesnecessity for removing metallic Si having solidified again afterformation of single crystal SiC. Therefore, the size and thickness ofthe metallic Si 4 are adequately selected in accordance with the size ofsingle crystal SiC to be formed. As will be described later, in case ofincreasing the thickness of single crystal SiC to be formed, separatemetallic Si as a supply source of Si in the graphite crucible 8 can beprovided in a graphite crucible or the like, which is accommodatedwithin the graphite crucible 8 to suffer heat treatment.

The growth mechanism of single crystal SiC will be described in brief.Attendant upon heat treatment, melted Si permeates between the singlecrystal SiC substrate 1 and the upper polycrystal SiC substrate 2 toform a Si melt layer having a thickness of about 30 micrometer to 50micrometer at the interface between both substrates 1 and 2. The Si meltlayer becomes thinner to about 30 micrometer as the temperature of heattreatment increases. C atoms flowing out of the polycrystal SiCsubstrate 2 are supplied to the single crystal SiC substrate 1 throughthe Si melt layer, so that single crystal 6H—SiC grows on the singlecrystal SiC substrate 1 by the liquid phase epitaxial growth(hereinafter referred to as LPE). Because the interval between thesingle crystal SiC substrate 1 as a seed crystal and the polycrystal SiCsubstrate 2 is thus narrow, there is generated no heat convection uponheat treatment. Therefore, the interface between formed single crystalSiC and the single crystal SiC substrate 1 as a seed crystal is verysmooth, and distortion or the like is not formed in the interface. Thus,very smooth single crystal SiC is formed. In addition, becausegeneration of nuclei of SiC is suppressed upon heat treatment,generation of fine grain boundaries in formed single crystal SiC can besuppressed. In the growth method of single crystal SiC according to thisembodiment, because melted Si permeates only between the single crystalSiC substrate 1 and the polycrystal SiC substrate 2, no other impuritiespermeate in growing single crystal SiC. Thus, highly pure single crystalSiC can be produced.

On the other hand, as the method of interposing very thin metallic Simelt layer between the single crystal SiC substrate 1 and thepolycrystal SiC substrate 2, the method illustrated in FIG. 2 is alsopossible. In FIG. 2, the same components as in FIG. 1 are denoted by thesame reference numerals as in FIG. 1 and the detailed descriptionthereof is omitted.

As illustrated in FIG. 2, metallic Si 15 having a thickness of about 30micrometer to 50 micrometer is interposed in advance on the surface ofthe single crystal SiC substrate 1 as a seed crystal. As a method ofinterposing, a film may be formed on the surface of the single crystalSiC substrate 1 by CVD or the like, or Si powder may be put on thesurface. The method is not particularly limited. In addition, a graphitecrucible 13 charged with metallic Si 14 is accommodated in the graphitecrucible 8. The amount of metallic Si 14 is adequately controlled suchthat formed single crystal SiC has a desired thickness.

As illustrated in FIG. 2, because metallic Si 15 having a thickness ofabout 30 micrometer to 50 micrometer is interposed in advance on thesurface of the single crystal SiC substrate 1 as a seed crystal, by heattreatment of 1450 degrees C or more, preferably, 2000 to 2300 degreesC., the wettability between the metallic Si interposed in advance andthe single crystal SiC substrate 1 is improved, and single crystal SiCis formed on the single crystal SiC substrate 1. In this embodiment,because metallic Si 14 as a Si supply source is separately accommodatedwithin the graphite crucible 8, the metallic Si 14 evaporates upon heattreatment and permeates between the polycrystal SiC substrate 2 andformed single crystal SiC to supplement evaporation of Si melt and workas a new Si source for growth of single crystal SiC. Thus, because thetemperature of heat treatment is controlled and a Si source for growthof single crystal SiC is separately supplied, the thickness of singlecrystal SiC can be controlled by keeping very thin metallic Si meltlayer for a long time. This makes it possible to freely produce from anepitaxial growth layer of single crystal SiC to a bulk body of singlecrystal SiC. As a Si supply source, other than the method ofaccommodating separate metallic Si within the same graphite crucible asin this embodiment, it is also possible to externally supply Si-basegas. Besides, as a Si supply source, as illustrated in FIG. 1 asdescribed above, metallic Si can be put on the polycrystal SiC substrate2.

FIG. 3 are microphotographs showing a surface condition of singlecrystal SiC grown by the above-described method. In FIG. 3, (a) is amicrophotograph showing the surface morphology and (b) is amicrophotograph showing its section. As shown in FIG. 3, in the growthsurface of the crystal by the LPE method, a very flat terrace and a stepstructure are observed.

FIG. 4 show results of observing the surface with an atomic forcemicroscope (hereinafter referred to as AFM). As observed in FIG. 4, itis understood that the heights of steps are 4.0 nm and 8.4 nm,respectively. These are integral times the height of a three-molecularlayer of a SiC molecule, one-molecular layer of which has a height of0.25 nm. Thus, it is understood that the surface is very flat.

In addition, as understood also from the microphotograph of the surfacemorphology in FIGS. 3, no micropipe defects are observed in the surface.From these, in single crystal SiC according to the present invention, itis understood that the density of micropipe defects formed in thesurface is very low as 1/cm² or less, the width of the terrace formed inthe surface is large as 10 micrometer or more, and the terrace is flatand has less defects.

In general, epitaxial growth of a crystal progresses one-molecular layerby one-molecular layer. In single crystal SiC according this embodiment,however, its surface is constituted by a broad terrace of 10 micrometeror more and steps each having a height as the minimum unit of athree-molecular layer. From this, it is thinkable that step bunchingoccurs in the process of crystal growth. The step-bunching mechanism canbe explained by the effect of surface free energy in crystal growth. Insingle crystal 6H—SiC according to this embodiment, there are two kindsof layer period directions of ABC and ACB in a unit layer period.Therefore, by numbering the layers as 1, 2, and 3 from each layer atwhich the layered direction changes, three kinds of surfaces can bedefined as illustrated in FIG. 5. The energy of each surface has beenobtained as follows (T. Kimoto et al., J. Appl. Phys. 81 (1997)3494-3500):

6H1=1.33 meV

6H2=6.56 meV

6H3=2.34 meV.

Because the energy thus varies from surface to surface, the rate of theterrace expansion varies. That is, the higher the surface free energy ofthe surface is, the higher the rate of the growth of the terrace is.Thus, as illustrated in FIGS. 5( a), (b), and (c), step bunching occursin each three periods. In addition, in this embodiment, it is thinkablethat the number of dangling bonds exposed from the step surface variesstep by step due to the difference in layer period, i.e., ABC or ACB,and step bunching further occurs in a unit of three molecules due to thedifference in the number of dangling bonds exposed from the step end. Itis thinkable that the advancing rate of one step is low at where onedangling bond is exposed from the step, and high at where two danglingbonds are exposed. Thus, in 6H—SiC, it is thinkable that step bunchingprogresses in a unit of height semi-integral times the lattice constant,and after growth, the surface of single crystal SiC is covered withsteps each having the minimum unit of a three-molecular layer and a flatterrace.

As described above, in single crystal SiC according to this embodiment,its terrace is formed by step bunching. Therefore, steps are formed tobe concentrated in the vicinity of an end of single crystal SiC. InFIGS. 3 and 4 as described above, an end portion of single crystal SiCwas observed for observing the step portions.

In addition, in single crystal SiC in this embodiment, the growthtemperature is very high as 2000 degrees C. in comparison with thegrowth temperature of conventional single crystal SiC. As the growthtemperature is raised, the solubility of C in Si melt formed between thesingle crystal SiC as a seed crystal and the polycrystal SiC increases.In addition, it is thinkable that the diffusion of C in the Si meltincreases as the temperature is raised. Because the supply source of Cand the seed crystal are thus very close to each other, a high growthrate as 500 micrometer/hr can be realized as shown with black circularmarks in FIG. 6.

From FIG. 6, it is understood that there is a tendency that the growthrate can be approximated with a straight line in the whole temperaturerange. In the tendency, however, it is understood that the gradient inthe higher-temperature portion is gentler than that in thelower-temperature portion. In addition, it has been reported that theactivation energy of the growth rate varies in accordance with thedisposition direction of the seed substrate. Thus, in the solutiongrowth of SiC, a large number of factors, i.e., the diffusion process ofC in Si melt, the diffusion process of C in the substrate surface, thedesolvation process of C, and the process of being taken in a crystal asSiC, are complicatedly intertwined.

As a growth driving force in solution growth, oversaturation occurs dueto the difference between the equilibrium concentration C_(e) of thecrystal at the growth temperature and the concentration C_(S) of themelt on the crystal surface, and the crystal growth progresses. In meltgrowth of SiC, in general, oversaturation is produced by setting theseed substrate at a low temperature to make Ce lower than the rawmaterial as a supply source of C. In the present invention, however,because no temperature difference is made between the single crystal SiCsubstrate as a seed crystal and the polycrystal SiC substrate as asupply source of C, the growth direction can be independent oftemperature difference. Thus, it is understood that the oversaturationdegree as a driving force for crystal growth is not given by thetemperature difference between the raw material and the growing crystal.Therefore thinkable is the equilibrium concentration in the crystalsurface dependent upon difference in polymorph and crystal size. Thevapor pressure of SiC varies in accordance with polymorph. The vaporpressure of 3C—SiC is higher than that of 6H—SiC. In addition,decomposition is suppressed in the range of the larger crystal size of apolycrystal. It is thinkable that the quantity of SiC solved in the Simelt varies due to the difference in surface energy caused by thecrystal size. Therefore, it is thinkable that the equilibriumconcentration C₃ ^(6H) of 6HSiC and the equilibrium concentration C_(e)^(poly) of the polycrystal board differs from each other and a relationof:C_(e) ^(6H) less than C_(Liquid) less than C_(e) ^(poly)is effected, where C^(Liquid) represents the concentration of C in Simelt. The difference between C_(e) ^(6H) and C_(e) ^(poly) generatesoversaturation to progress the growth. Therefore, it is thinkable thatthe oversaturation caused by the difference in equilibrium concentrationbetween the polycrystal and the seed substrate is the growth drivingforce of single crystal SiC according to this embodiment. Thus, at thegrowth temperature, it is thinkable that C of the polycrystal SiCsubstrate is decomposed and dissolved in the Si melt, diffused on thesurface of the single crystal SiC substrate as a seed crystal, performsdesolvation on the single crystal SiC substrate through surfacediffusion, and taken in the crystal.

As described above, in single crystal SiC according to this embodiment,the density of micropipe defects in the surface is 1/cm² or less, and aterrace having a large width of 10 micrometer or more is formed.Therefore, there is required no surface treatment such as mechanicalprocessing after the formation of single crystal SiC. Besides, becausethere is less crystal defects and the like, it is usable forlight-emitting diodes and various semiconductor diodes. In addition,because the growth of the crystal depends upon not temperature but thesurface energies of the seed crystal and the crystal of the supplysource of C, there is no need of strict temperature control in the treatfurnace. This makes it possible to considerably reduce the manufacturingcost. Further, because the interval between the single crystal SiC as aseed crystal and the polycrystal SiC as a supply source of C. is verynarrow, heat convection upon heat treatment can be suppressed. Besides,because a temperature difference is hard to be generated between thesingle crystal SiC as a seed crystal and the polycrystal SiC as a supplysource of C, heat treatment can be performed in a thermal equilibriumstate.

Although 6H—SiC is used as a seed crystal in this embodiment, 4H—SiC isalso usable.

In addition, in single crystal SiC according to the present invention,the size of single crystal SiC to be formed can be controlled byadequately selecting the sizes of the single crystal SiC as a seedcrystal and the polycrystal SiC substrate as a supply source of C. Inaddition, because no distortions are formed between formed singlecrystal SiC and the seed crystal, single crystal SiC having a verysmooth surface can be produced. This makes it possible to apply singlecrystal SiC according to the present invention to a surface refiningfilm.

Further, by applying heat treatment by the above-described method in astate wherein single crystal SiC as a seed crystal and polycrystal SiCas a supply source of C are alternately piled up or laterally arranged,a large amount of single crystal SiC can be produced at once.

In addition, in a producing method of single crystal SiC according tothe present invention, the conductivity of p-type or n-type of thegrowth crystal can be arbitrarily controlled by beforehand addingimpurities of group III metal such as Al or B in the polycrystal SiCsubstrate and metallic Si, or introducing gas containing an element suchas nitrogen, Al, or B in the atmosphere in growth for controlling theconductivity of SiC.

FIGS. 7 show cathode luminescence measurement results of LPE-grownsingle crystal SiC, using the SiC ring 6 (see FIG. 1), in which B hasbeen added, for supporting the single crystal SiC substrate 1 as a seedcrystal and the polycrystal SiC substrates 2 and 3. FIG. 7( a) showsresults of measurement of emission spectrum from a growth crystalexcited by an electron beam when the electron beam of an accelerationvoltage of 25 kV was applied to a surface of single crystal SiC at ameasurement temperature of 100 k. FIG. 7( b) is a diagram typicallyshowing band bonding in single crystal SiC for explaining the emissionspectrum of FIG. 7( a).

As shown in FIG. 7, in single crystal SiC according to this embodiment,peaks appear at optical energy positions of 3.07 eV, 2.99 eV, 2.93 eV,2.73 eV, 2.65 eV, 2.59 eV, 2.48 eV, 2.40 eV, and 2.34 eV. In otherwords, it is understood that light emissions having the respectiveenergies occur. The light emission of each energy can be explained asfollows as shown in FIG. 7( b). The light emission at 3.07 eV shows alight emission between the conduction band and the valence band. Thelight emission at 2.99 eV shows a light emission between a donor levelE_(D)1 and the valence band. The light emission at 2.93 eV shows a lightemission between a donor level E_(D)2 and the valence band. The lightemission at 2.73 eV shows a light emission between the conduction bandand an acceptor level E_(A)1. The light emission at 2.65 eV shows alight emission between the donor level E_(D)1 and the acceptor levelE_(A)1. The light emission at 2.59 eV shows a light emission between thedonor level E_(D)2 and the acceptor level E_(A)1. The light emission at2.48 eV shows a light emission between the conduction band and anacceptor level E_(A)2. The light emission at 2.40 eV shows a lightemission between the donor level E_(D)1 and the acceptor level E_(A)2.The light emission at 2.34 eV shows a light emission between the donorlevel E_(D)2 and the acceptor level E_(A)2. Thus, emissions different inenergy occur and each impurity level can be clearly defined. This showsthat the producing method of single crystal SiC according to thisembodiment is superior in control of implantation positions of addedimpurities. That is, it shows that the conductivity of single crystalSiC can be easily controlled to either of p-type and n-type.

INDUSTRIAL APPLICABILITY

According to the present invention, local liquid phase epitaxial growthcan be performed at a high temperature in the same environment as aconventional high-temperature heat treat environment such as thesublimation method. Therefore, micropipe defects contained in the seedcrystal are not succeeded and closure of micropipe defects can beperformed. In addition, because the growing surface is always in contactwith Si melt, a state of an excess of Si is formed. Therefore,generation of defects caused by lack of Si can be suppressed. Inaddition, because the contact area of the used Si melt with the exterioris very small, mix of impurities in the growing surface can besuppressed. Thus, high-quality, high-performance single crystal SiC withhigh purity superior in crystallinity can be grown. Besides, becausethis growth method can realize growth at a very high temperature incomparison with the conventional LPE method, the growth rate can beremarkably improved in comparison with the conventional LPE method. Thiscan make the growth efficiency of high-quality single crystal SiC veryhigh. Further, there is no need of strict temperature gradient controlupon single crystal growth, and it is possible to use a simpleapparatus. From these, it can be promoted to put to practical use singlecrystal SiC that is superior in high temperature, high frequency,withstand voltage, and environmental resistance properties in comparisonwith any existing semiconductor material such as Si and GaAs, andexpected as a semiconductor material for power devices andhigh-frequency devices.

1. A silicon carbide single crystal, comprising: a terrace of more than10 micrometer in width, and no fine grain boundaries of the threadingscrew dislocation type wherein the silicon carbide single crystal isepitaxial to a surface of an on-axis (0001) Si plane of a seed siliconcarbide single crystal.
 2. A method for the preparation of a singlecrystal silicon carbide bulk body comprising employing the singlecrystal silicon carbide according to claim 1 as a surface epitaxialgrowth layer of the single crystal silicon carbide bulk body.
 3. Thesilicon carbide single crystal according to claim 1, further comprisinga group III metal, wherein a p-type conductivity is obtained.
 4. Thesilicon carbide single crystal according to claim 1, further comprisinga group V element, wherein a n-type conductivity is obtained.